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Case study: semiconductor clean room monitoring with an M-Duino PLC

Case study of a clean room where semiconductor wafers wait before processing. An Industrial Shields M-Duino PLC reads temperature, humidity and particle sensors in several points of the room, checks each point against its own band, raises an alarm when one leaves it and keeps two copies of every reading, in a backup database and in a cloud server. A TouchBerry Pi Panel PC outside the room shows the values.

The PDF covers the challenge, the three tasks (measure, warn, keep the data), the system architecture with the signal table and the hardware used. Interactive version: semiconductor clean room case study online.

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